Surface Characterization

Ellipsometer

Woollam / M2000

The ellipsometer is a machine for measuring film thickness and refractive index using light. The machine is designed to measure film thickness to the nanometer. It also measures a film’s refractive index. The main specifications of the machine: Sample size: 5 to 200 mm diameter, spot diameter: 4 mm diameter, wavelength range: 248-995 nm.

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Measurement and data analysis

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