Focused Ion Beam System


The Focused Ion Beam System (FIB) is an instrument, which microfabricates a sample and get the observed image of the sample as well by scanning ion beams. Other than microfabrication and observation functions, it can be used for the drawing function to read BMP data and draw the image based on them, the micro-sampling function to slice a sample into thin pieces and pick it up, and the deposition function to deposit carbon or tungsten onto a sample.In this course, a series of procedures for basic fabrication and observation is explained.


Overview of the FIB instrument

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Preparation for fabrication

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