This machine is a type of electron microscope. Microscope images can be obtained by detecting secondary electrons generated from a surface, while scanning thin squeezed electron beam on the sample surface. As the image can be obtained using low voltage beams, even a non-conductive specimen can be observed without evaporation coating.
It is also able to perform elemental analysis by detecting characteristic X-rays, which are emitted with secondary electrons, using the auxiliary EDX detector. It can detect elements from Be to Pu.