Surface Characterization

KLA-Tencor P-16+ Surface Profiler

KLA-Tencor P-16+ Surface Profiler

The KLA-Tencor P-16+ is a contact-stylus surface profiler that employs a diamond stylus as its tip (probe). The P-16+ measures surface features such as step height, roughness, and waviness by tracing the stylus over the surface of the object while applying low force.
By moving the sample stage laterally while the stylus is in direct contact with the sample surface, the stylus moves vertically while scanning over microfeatures in the surface. A sensor simultaneously stores the needle positions for measuring the surface profile.


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